Axcelis axcelis purion m - 150mm implant

Axcelis Axcelis Purion M - Implant<br /> <br /> Vintage: 2024<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN MES/ERP name: MC4<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 360 x 810 x 310<br /> Mainframe weight (kg): <br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool