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Aixtron G10+ - Epitaxy<br /> <br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Chambers/configuration: 1<br /> Former BelGaN MES/ERP name: MOCVD<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 145 x 150 x 160<br /> Mainframe weight (kg): <br /> Bypack1 dim (cm): 240 x 135 x 210<br /> Bypack1 weight (kg): <br /> Bypack2 dim (cm): 185 x 270 x 255<br /> Bypack2 weight (kg): <br /> Bypack3 dim (cm): 40 x 85 x 87<br /> Bypack3 weight (kg): <br /> Bypack4 dim (cm): 45 x 70 x 80<br /> Bypack4 weight (kg): <br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
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