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Canon FPA 3000 i5+ - I-line Stepper<br /> <br /> Vintage: 2007<br /> SN: 7072885<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN MES/ERP name: STEPPER12<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 191 x 265 x 256<br /> Mainframe weight (kg): 2700<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool