Hitachi hitatchi s 9220 - 150mm cd measurement

Hitachi Hitatchi S 9220 - CD measurement<br /> <br /> Vintage: 2000<br /> SN: 9727-10<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN MES/ERP name: SEM5<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 120 x 200 x 190<br /> Mainframe weight (kg): 2000<br /> Bypack1 dim (cm): 60 x 130 x 190<br /> Bypack1 weight (kg): 340<br /> Bypack2 dim (cm): 80 x 54 x 190<br /> Bypack2 weight (kg): 380<br /> Bypack3 dim (cm): 27 x 40 x 65<br /> Bypack3 weight (kg): 80<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool