Lam rainbow tcp 9600se ii standalone with dsq - 150mm plasma etch

LAM Rainbow TCP 9600SE II standalone with DSQ - Plasma Etch<br /> <br /> Vintage: 2005+/-5j<br /> SN: 4276<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN process: metalpets<br /> Former BelGaN MES/ERP name: TCP6<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 125 x 220 x 190<br /> Mainframe weight (kg): 1500<br /> Bypack1 dim (cm): 50 x 50 x 25<br /> Bypack1 weight (kg): 50<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool