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Canon FPA 2500 I3 - I-line Stepper<br /> <br /> Vintage: 1994<br /> SN: 402560<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN MES/ERP name: STEPPER11<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 224 x 255 x 250<br /> Mainframe weight (kg): 2500<br /> Bypack1 dim (cm): 60 x 95 x 177<br /> Bypack1 weight (kg): <br /> Bypack2 dim (cm): 66 x 85 x 200<br /> Bypack2 weight (kg): <br /> Bypack3 dim (cm): 62 x 64 x 193<br /> Bypack3 weight (kg): <br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool