Lam rainbow 4526i - 150mm plasma etch

LAM Rainbow 4526I - Plasma Etch<br /> <br /> Vintage: 2000+/-3j<br /> SN: 2498<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN process: oxidepets<br /> Former BelGaN MES/ERP name: LAM7<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 111.8 x 137.2 x 167.5<br /> Mainframe weight (kg): 788<br /> Bypack1 dim (cm): 55.9 x 81.3 x 110.5<br /> Bypack1 weight (kg): 135<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool