Kla uv1280 - 200mm tickness measurement

KLA uv1280 - Tickness measurement<br /> <br /> Vintage: 1997+/-2j<br /> SN: 970476UV1280SE<br /> Wafersize: 200mm<br /> Former BelGaN MES/ERP name: UV1281<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 152 x 105 x 170<br /> Mainframe weight (kg): 1000<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool