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Applied Materials P5000 - Plasma Etch<br /> <br /> Vintage: 1995<br /> SN: 6854<br /> Wafersize: 200mm<br /> Chambers/configuration: 2 etch<br /> Former BelGaN process: taperpets<br /> Former BelGaN MES/ERP name: AMAT5<br /> <br /> Dimensions & weight estimates:not yet available<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool