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Applied Materials P5000 - Plasma Etch<br /> <br /> Vintage: 1992<br /> SN: 6379<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Chambers/configuration: 2 etch <br /> Former BelGaN process: polypets<br /> Former BelGaN MES/ERP name: AMAT1<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 135 x 195 x 190<br /> Mainframe weight (kg): <br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool