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TEL Clean Track MVIII - Coater<br /> <br /> Vintage: 2011<br /> SN: 815504<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Chambers/configuration: 1 coat cup, 1 develop cup<br /> Former BelGaN process: picoat<br /> Former BelGaN MES/ERP name: PICOAT3<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 180 x 150 x 235<br /> Mainframe weight (kg): <br /> Bypack1 dim (cm): 90 x 65 x 182<br /> Bypack1 weight (kg): <br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
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