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SDI FAaST 230-DP-SPV - SPV measurement<br /> <br /> Vintage: 1999<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN MES/ERP name: SPV2<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 150 x 136 x 100<br /> Mainframe weight (kg): 500<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool