Kla surfscan 6200 - 150mm defect inspection system

KLA SURFSCAN 6200 - Defect inspection system<br /> <br /> Vintage: 1992<br /> SN: 168.904<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN MES/ERP name: SURFSCAN<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 76 x 105 x 167<br /> Mainframe weight (kg): 1000<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool