Nanometrics rpm blue - 150mm photoluminescence measurement

Nanometrics RPM Blue - Photoluminescence measurement<br /> <br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN MES/ERP name: PL1<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 80 x 110 x 150<br /> Mainframe weight (kg): 500<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool