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Applied Materials 5200 Centura - CVD<br /> <br /> Vintage: 1997<br /> SN: 9320<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Chambers/configuration: 3<br /> Former BelGaN process: pecvd, peteos<br /> Former BelGaN MES/ERP name: CENT13<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 250 x 240 x 245<br /> Mainframe weight (kg):<br /> Bypack1 dim (cm): 52 x 75 x 75<br /> Bypack1 weight (kg):<br /> Bypack2 dim (cm): 52 x 75 x 75<br /> Bypack2 weight (kg):