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LAM Rainbow TCP 9600SE II standalone with DSQ - Plasma Etch<br /> <br /> Vintage: 2005+/-5j<br /> SN: 4151<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN process: metalpets<br /> Former BelGaN MES/ERP name: TCP7<br /> <br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 125 x 220 x 190<br /> Mainframe weight (kg): 1500<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.