Mainframes - lam rainbow 4528xl - 200mm plasma etch

LAM Rainbow 4528XL - Plasma Etch<br /> Current tool status: Deinstalled, foil wrapped and stored in warehouse, ready to to load for packaging<br /> Wafersize: 200mm<br /> Former BelGaN process: oxidepets<br /> Former BelGaN MES/ERP name: LAM13<br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 111.8 x 137.2 x 167.5<br /> Mainframe weight (kg): 788<br /> Bypack1 dim (cm): 55.9 x 81.3 x 110.5<br /> Bypack1 weight (kg): 135<br /> Bypack2 dim (cm): 55.9 x 22.9 x 76.2<br /> Bypack2 weight (kg): 120<br /> Bypack3 dim (cm): 47.5 x 93 x 126<br /> Bypack3 weight (kg): 226.8<br /> mainframe equipment tool