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Gasonics L3510 - Asher<br /> Current tool status: Deinstalled, quartz cleaned and stored in separate box, foil wrapped, in warehouse ready to to load for packaging<br /> Vintage: 1995<br /> SN: 97072<br /> Wafersize: 150mm<br /> 200mm convertible: Yes<br /> Former BelGaN MES/ERP name: STRIPPER5<br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 85 x 110 x 155<br /> Mainframe weight (kg): 200<br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool