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Tegal Tegal 901e - Plasma Etch<br /> Current tool status: Deinstalled, foil wrapped and stored in warehouse, ready to to load for packaging<br /> Vintage: 1995+/-3j<br /> SN: 11170C101824<br /> Wafersize: 150mm<br /> Former BelGaN process: overlaypets<br /> Former BelGaN MES/ERP name: TEGAL9013<br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 193 x 100 x 158<br /> aferfab fab fab2 mainframe equipment tool