Mainframes - tegal tegal903e - 150mm plasma etch

Tegal Tegal903e - Plasma Etch<br /> Current tool status: Deinstalled, foil wrapped and stored in warehouse, ready to to load for packaging<br /> Vintage: 1995+/-3j<br /> SN: 9032<br /> Wafersize: 150mm<br /> Former BelGaN process: spacerpets<br /> Former BelGaN MES/ERP name: TEGAL9031<br /> Dimensions & weight estimates:<br /> Mainframe dim (cm): 193 x 100 x 158<br /> Mainframe weight (kg): <br /> <br /> Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.<br /> <br /> <br /> semiconductor BelGaN waferfab fab fab2 mainframe equipment tool